Controllers & Drivers
The performance and usability of a precision positioning system depends on the mechanics, motion control electronics, and software. We offer Physik Instrument Controllers for traditional piezo actuated nano-positioning systems, as well as motorized positioning systems based on linear motors, brushless motors, servo motors, and stepper motors. In addition, novel controllers for ultrasonic motors, stick-slip motors, and PiezoWalk motors are also available from PI.
Product Lineup
Piezo Controllers & Drivers
E-712.1AM Digital Motion Controller
For NEXLINE® Piezo Walking Drives, 1 Axis
- Special control algorithms for NEXLINE® nanopositioning linear-motor actuators
- Highly stable 20-bit D/A converter
- Servo frequency 50 kHz
- Flexible interfaces: TCP/IP, USB, RS-232
- Wave generator
- Data recorder
E-862 Low-Cost NEXACT® Piezo Motor Driver
- For NEXACT® piezo motor drives & nano positioning Stages
- Combined step generator and power amplifier
- Cost-effective design
- Interface for automation, joystick for manual operation
E-872 Stick-Slip Piezo Driver/Controller
For Open-Loop Piezo-Ratchet Actuators / Q-Motion Stages
- Integrated power amplifier and voltage generator for piezo inertia drives
- OEM driver available
- Serial control of up to 4 stages and actuators by one unit
- TCP/IP, USB, USB for joystick, digitial I/O
E-873 Servo Controller
For Closed-Loop Piezo-Ratchet Actuators / Q-Motion Stages
- Integrated power amplifier and voltage generator for piezo inertia drives
- TCP/IP, USB, RS-232
- Extensive software support: LabVIEW, MATLAB, C / C++ / C# / VB.NET, Python
- Optional joystick for manual operation
E-709 Low-Cost Digital Servo Piezo Motion Controller, 1 Channel
- Flexibility of Digital Signal Processing and Control for the Cost of Analog
- Digital Motion Control Algorithms with 10 kHz Sampling Rate
- For Capacitive Sensors and Piezo Resistive Strain Gauge Sensors
- Linearity to 0.02%
- USB and RS-232 Interfaces
- Fast 25 Mbit/s Serial Interface
- Additional High-Bandwidth Analog Control Input / Sensor Input
- Analog Output, e.g. for External Amplifiers
- Low-Cost OEM-Versions Available
- Fast Digital Controller, Software-Configurable Servo Parameters
- Parameter Input Using Software
E-709.1C1L Next Gen Compact Piezo Controller
For 1 Axis Closed-loop Piezo Mechanisms
- Digital servo for advanced control
- 20 kHz sampling rate / control bandwidth
- 24 Bit DAC, 19 bit sensor resolution
- For capacitive feedback sensors
- Interfaces: USB, SPI, and RS-232
- Additional analog control input
- Linearity to 0.01%
- 28W peak power
E-727 Low-Cost Multi-Axis Digital Servo Motion Controller
For 3/4 Axis Closed-Loop Piezo Mechanisms
- Digital servo for advanced control algorithms
- 25 kHz control bandwidth
- For capacitive and piezo-restive strain gauge feedback sensors
- Optional high resolution analog control inputs and outputs
- Interfaces: Ethernet, USB, and RS-232
- Digital inputs and outputs
E-754 Reference Class Digital Piezo Controller
For 1 Axis Closed-Loop Piezo Mechanisms
- 50kHz servo loop
- 22-Bit DAC resolution
- 20-Bit analog input
- 45W peak power, 500mA peak current
- Extensive software package
- Ethernet (TCP/IP), SPI, USB, RS-232 interfaces
E-712 Modular Digital Piezo Motion Controller, up to 6 Axes
- Digital Motion Controller of the Latest Generation: 600 MHz Processor; up to 50 kHz Sensor Update Rate;
- Highly Stable 20-bit D/A Converters
- Real-Time Operating System for Excellent Trajectory Control
- Modular Design for Greatest Flexibility in Meeting Custom Requirements
- Auto-Calibrating from Stage ID-Chip for Interchangeability of Controller and Mechanics w/o Recalibration
- Flexible Interfacing: USB, RS-232 & Ethernet
- Optional High-Bandwidth Analog Inputs and Outputs
E-616 Analog Motion Controller
For Multi-Axis Piezo Tip/Tilt Mirrors and Platforms
- Precision motion control for piezo nano positioning systems
- Bench-top and OEM versions
- Three integrated amplifiers provide up to 10W peak power
- Closed-loop and open-loop versions
- Internal coordinate transformation simplifies control of parallel kinematics designs (tripod & differential drive)
- Compact and cost-effective design for OEMs or bench-top
E-664 NanoCube® Piezo Controller
- 3 x 14 W Peak Power
- Closed-Loop Precision Motion Control
- For P-611 NanoCube® Nano Positioning XYZ Stages
E-536 PicoCube® Piezo Controller
- Extremely Low Noise: Resolution to 25 Picometers
- For P-363 PicoCube® Systems
- Peak Power 3 x 100 W
- Ultra-Low Noise
- Output Voltage ±250 V
E-618 / E-619 High-Power Piezo Driver/Controller, -30 to 130V
High Bandwidth, Linear and Switched with Energy Recovery
- 1200W peak power, 10A peak current (switched)
- 3200W peak power, 20A peak current (linear)
- Output voltage -30 to 130V
- Optional position servo-motion controller module
- Optional computer interface and display module
- Bandwidth to 20kHz for high dynamics applications
E-617 High-Power Piezo Driver, -30 to 130V
Linear Amplifier, OEM Module
- 280W peak power, 2A peak current
- Output voltage -30 to 130V
- OEM module & top hat rail module
- 3.5khz bandwidth
E-482/E-481/E-470 High-Power Piezo Driver/Controller
0 to 1050V and ±500V, Linear and Switched Models
- High-voltage amplifier up to 6kW peak power
- Linear amps and switched amps with energy recovery
- Output voltage 0 to 1050V and bipolar
- Optional position servo-motion controller module
- Optional computer interface and display module
- Differential output
E-651 Piezo Controller for Closed-Loop Low-Voltage Piezo (60 V) Multilayer Bender Actuators
- Controller for Closed-Loop Multilayer Bimorph Actuators
- 1- and 2-Channel Versions
- Integrated Linear Amplifiers
- Bench-Top & OEM-Board Versions
E-650 Piezo Drivers
For Low-Voltage Piezo (60V) Multilayer Bender Actuators
- Specifically designed to drive multilayer bimorph piezo actuators
- Bench-top and OEM versions
- Integrated Llnear amplifier w/ up to 18W peak power
- LCD voltage display
- Output voltage ±30V or 0 to 60V and separate fixed voltage
E-609 OEM Piezo Controller with Digital Servo: Increased Performance for Low-Cost Piezo Systems
- Open-Loop and Closed-Loop Versions
- Most Cost-Efficient Digital Piezo Motion Controller
- Servo Tuning and Parameter Setting by Software
- Digital Algorithms Improve Linearity
- Analog Control Input for Target Values
E-413 Compact Piezo Driver
For DuraAct™ Patch Transducers and PICA™ Shear Piezo Actuators
- Peak power to 50W
- Output voltage to +/-250V
- OEM module / bench-top for PICA™ shear actuators
- OEM module for DuraAct™ piezoelectric patch transducers
Low-Power High Voltage Driver (1000V)
Benchtop and OEM Module
- Runs on 12V: battery or p/s operation
- Single channel high voltage piezo driver
- Output voltage range +10 to +1000V
E-500 Modular Piezo Motion Controller System, up to 6 Channels, for Low Voltage and High Voltage Piezo Systems
- Modular Piezo Controller System with many Options
- For High Power Amps to 280 Watts
- Up to 6 Channels
- Choice of Linear Amplifier Modules, Low & High Voltage
- Optional Servo-Motion Controller for Cap Sensors, Strain Sensors and Piezo Resistive Sensors
- Optional USB Interface, TCP/IP, RS-232
- Optional Display Module
E-506 Linearized Piezo Driver
- Highly linear amplifier module
- 280W peak power
- Output voltage range -30 to 130V
- Module for E-500 piezo controller rack
- Prepared for position servo-motion control upgrade (optional)
- Prepared for interfaces / display modules (optional)
E-665 Piezo Servo-Controller with 24 Bit High-Speed USB Interface
- Closed-Loop Precision Motion Controller for Nano Positioning Systems
- Integrated 24-Bit High-Speed USB & RS-232 Interfaces
- Network Capability with up to 12 Channels
- Integrated Linear Piezo Driver with 36 W Peak Power
- For Piezo Sytems with SGS and Capacitive Sensor Feedback
- Table for User-Defined Curves
- GCS (General Command Set) Compatible
- UL and CSA certified
E-625 Compact Piezo Servo-Controller with 24 Bit High-Speed USB Interface
- Closed-Loop Precision Motion Controller for Nano Positioning Systems
- Integrated 24-Bit High-Speed USB & RS-232 Interfaces
- Integrated Linear Piezo Driver, 14 W Peak Power
- Network Capability with up to 4 Channels
- For Piezo Systems with Capacitive and Strain Gauge Position Feedback Sensors
- Wave Table for User-Defined Curves
- GCS (General Command Set) Compatible
E-663 Low Voltage (100V) Piezo Driver
3 Channels
- 3 independent output channels
- Integrated linear amplifiers, 3 x 14W peak power
- 3 LED voltage displays
- Output voltage range – 20 to 120V
E-464 High-Voltage Piezo Driver (1000V)
3 Channels
- 3 independent channels
- Integrated linear amplifiers, 3 x 25W peak power
- 3 LED voltage displays
- Output voltage range 0 to + 1000V
E-861 High-Speed Digital Piezo PiezoWalk® NEXACT® Motion Controller/Driver
- For NEXACT® Piezo Motor Drives and Nano Positioning Systems
- Complete System with Controller, Integrated Power Amplifiers and Software
- Open-Loop Operation, or Closed-Loop with Linear Encoder
- High Performance at Low Cost
- Daisy-Chain Networking for Multi-Axis Operation
- Non-Volatile Macro Storage for Stand-Alone Functionality with Autostart Macro
- I/O for Automation, Joystick for Manual Operation
- Parameter Changes On-the-Fly
E-471 High-Power, Modular High Voltage (1000 V) Piezo Drivers / Controllers
- Integrated Linear High-Voltage Amplifier w/ 550 W Peak Power
- Output Voltage -3 to -1100 V & Bipolar
- 1- and 2-Channel Versions
- Optional Position Servo-Motion Control Modules
- Optional RS-232 & IEEE 488 Interface Module & Display
E-481 High-Power, High-Voltage Piezo Driver / Controller with Energy Recovery
- High-Voltage Amplifier with 2000 W Peak Power
- Energy Recovery
- Output Voltage 0 to ±1000 V and bipolar
- Optional Position Servo-Motion Controller Module
- Optional Computer Interface and Display Module
- Differential Output
E-710 Multi-Channel Digital Piezo Controller with Dynamic Linearization
- Precision Motion Control for Piezo Nano Positioning Systems with Capacitive Feedback Sensors
- 3-, 4- & 6-Channel Versions
- 32-Bit Digital Filters
- Hardware and Firmware Linearization
- Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
- Optional Dynamic Digital Linearization (Firmware Option) Improves Scanning Linearity
- ID Chip Support for Automatic Calibration
- Optional High-Speed Parallel I/O or DSP Interface
- Optional Analog Input
- Integrated Linear Amplifiers
- GCS (General Command Set) Compatible
E-725 Digital Piezo Motion Controller For 3-Axis High-Precision Positioning Systems
- Precision Motion Control for Nano Positioning Systems with Capacitive Sensors
- 3-Channel Version
- Powerful Digital Controller: DSP 32-bit Floating Point, 225 MHz; 20 kHz Sampling Rate; 24-bit DAC
- Communication via Ethernet, USB, RS-232
- 4th Order Polynomial Linearization for Mechanics & Electronics
- Dynamic Digital Linearization (DDL) Option for Improved Path Accuracy
- Auto-Loading of Calibration Data from Stage ID-Chip for Interchangeability of Controller and Mechanics
- Additional High-Bandwidth Analog Control Input / Sensor Input
- Optional High-Speed Parallel I/O Interface
- Flexible Wave Generators
- Digital I/O Lines for Task Triggering
- Extensive Software Support
E-753 Ultra-High Performance Digital Piezo Motion Controller, 1 Channel
- Next Generation Digital Motion Controller for Nano Positionning Provides Higher Flexibility, Accuracy and Speed
- 100 kHz Sensor Sampling; 32-bit Floating Point DSP; 24-bit Low-Noise D/A Converters
- Ethernet (TCP/IP) Interface for Remote Control Capability, RS-232
- Auto-Loading of Calibration Data from Stage ID-Chip for Interchangeability of Controller and Mechanics
- Additional High-Bandwidth Analog Control Input / Sensor Input
- Digital I/O Lines for Task Triggering
- Extensive Software Support
- For Nanopositioning Systems with Capacitive Sensors
E-761 3-Channel Digital Piezo Motion Controller for Nanopositioning in PCI-Board Format
- For Closed-Loop Piezoelectric Nanopositioning Systems with Capacitive Sensors
- High-Speed PCI Interface
- Additional High-Bandwidth Analog Interface
- 32-Bit Digital Filters
- 24-Bit DAC Resolution
- 2 Linearization Systems
- Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
- ID-Chip Support for Automatic Calibration
- Integrated Linear Amplifiers
- Extensive Software Package
Entry-Level High Performance Open-Loop Piezo Driver
- Cost-efficient piezo driver
- High output power for dynamic operation: up to 100mA source and sink current
- -30 to 130V output voltage
- Power supply included
Modules & Accessories
E-621 Piezo Amplifier & Servo-Controller Module with 24-Bit USB Interface
- 24-Bit USB Interface and High-Speed Analog Interface
- Notch Filters for Higher Bandwidth
- Networking for up to 12 Motion Controllers
- Choice of Sensor Strain Gauge (lower cost) or Capacitive Sensor (higher precision)
- Table for User-Defined Curves
E-610 LVPZT (100 V) Piezo Driver & Position Servo-Controller Modules, OEM Version
- Closed-Loop Precision Motion Controller for Nano Positioning Systems
- Open-Loop Version Available (lower Cost)
- For Piezo Nano Positioners with Capacitive & Strain Gauge Sensors
- Integrated Linear Amplifier, 14 W Peak Power
- Runs on Single Stabilized Voltage (12 to 30 VDC)
E-836 Low-Cost OEM Piezo-Driver Module & Benchtop
With Integrated High-Voltage Power Supply
- Open-loop driver
- PCB-mount possible
- 100 mA peak current for dynamic piezo operation
- Integrated high voltage power supply, requires one 24V source to operate
- Low noise, high stability
- Full overcurrent, short-circuit and temperature protection
E-831 OEM Piezo Driver and Power Supply Modules
- Cost Effective Piezo Driver
- Small Size
- Low Noise, High Stability
- Easy-to-Use
- Full Overcurrent, Short-Circuit and Temperature Protection
- Power-up/down Without Voltage Spikes
E-509 Sensor & Position Servo-Control Modules for Piezo-Driven Nanopositioning Systems
- Position Servo-Control for Piezo-Driven Nano Positioning Systems
- Improves Linearity
- Eliminates Drift & Hysteresis
- For Capacitive Sensors, Strain Gauge Sensors & LVDT Sensors
- Increases Piezo Stiffness
- Notch Filter for Improved Dynamics
E-518 Computer Interface and Display Module
For Modular Piezo Controllers
- Low-noise 24-bit D/A converter
- Sample rate 25kHz
- TCP/IP, USB, and RS-232 interfaces
- 6-Digit display for voltage and position
- 1- & 3-channel versions
- Wave generator with programmable trigger-I/O
E-503 LVPZT (100 V) Piezo Driver Module, 3 Channels
- Integrated Linear Piezo Amplifiers, 3 x 14 W Peak Power
- Output Voltage Range -20 to +120 V
- E-503.00S with 2 amplifier channels and one fixed voltage of +100V
E-504 High Power Piezo Driver Module
- Peak power 280W
- High average output power 100W
- Very energy efficient through energy recovery
- Output voltage range -30 to 130V
- Module for E-500 piezo controller rack
- Prepared for position servo-control upgrade (optional)
E-505 Piezo Amplifier Module High Power Controller
- 200 W Peak Power
- Output Voltage Range -20 to 120 V
- Module for E-500 Piezo Controller Rack
- Prepared for Position Servo-Motion Control Upgrade (optional)
- Prepared for Interfaces / Display Modules (optional)
E-508 High-Voltage Piezo Driver (1000V) Module
- Integrated linear amplifier, up to 400W peak power
- Output voltage Range +3 to +1100V & bipolar
- ±250V for shear actuators
E-760 NanoCube® Piezo Controller Card for F-206 / C-880 Controller
- Specially Designed for P-611 NanoCube®and F-206 HexAlign™ 6D Alignment System
- Built-in Optical Metrology for Automatic Alignment
- Integrated Linear Amplifiers with 3 x 9 W Peak Power
- Closed-Loop Precision Motion Control
E-530 Piezo Power Supply Accessories
- Included in E-500 Chassis
- Provides Power for all E-500-Installable Modules
- 90-264 VAC Operating Range
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