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Controllers & Drivers

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The performance and usability of a precision positioning system depends on the mechanics, motion control electronics, and software. PI offers dedicated controllers for traditional piezo actuated nano-positioning systems, as well as motorized positioning systems based on linear motors, brushless motors, servo motors, and stepper motors.  In addition, novel controllers for ultrasonic motors, stick-slip motors, and PiezoWalk motors are also available.

Product Lineup

E-709 Low-Cost Digital Servo Piezo Motion Controller, 1 Channel

Physik Instrument E-709 Low-Cost Digital Servo Piezo Motion Controller, 1 Channel

  • Flexibility of Digital Signal Processing and Control for the Cost of Analog
  • Digital Motion Control Algorithms with 10 kHz Sampling Rate
  • For Capacitive Sensors and Piezo Resistive Strain Gauge Sensors
  • Linearity to 0.02%
  • USB and RS-232 Interfaces
  • Fast 25 Mbit/s Serial Interface
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Analog Output, e.g. for External Amplifiers
  • Low-Cost OEM-Versions Available
  • Fast Digital Controller, Software-Configurable Servo Parameters
  • Parameter Input Using Software

E-753 Ultra-High Performance Digital Piezo Motion Controller, 1 Channel

Physik Instrument E-753 Ultra-High Performance Digital Piezo Motion Controller, 1 Channel

  • Next Generation Digital Motion Controller for Nano Positionning Provides Higher Flexibility, Accuracy and Speed
  • 100 kHz Sensor Sampling; 32-bit Floating Point DSP; 24-bit Low-Noise D/A Converters
  • Ethernet (TCP/IP) Interface for Remote Control Capability, RS-232
  • Auto-Loading of Calibration Data from Stage ID-Chip for Interchangeability of Controller and Mechanics
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Digital I/O Lines for Task Triggering
  • Extensive Software Support
  • For Nanopositioning Systems with Capacitive Sensors

E-761 3-Channel Digital Piezo Motion Controller for Nanopositioning in PCI-Board Format

Physik Instrument E-761 3-Channel Digital Piezo Motion Controller for Nanopositioning in PCI-Board Format

  • For Closed-Loop Piezoelectric Nanopositioning Systems with Capacitive Sensors
  • High-Speed PCI Interface
  • Additional High-Bandwidth Analog Interface
  • 32-Bit Digital Filters
  • 24-Bit DAC Resolution
  • 2 Linearization Systems
  • Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
  • ID-Chip Support for Automatic Calibration
  • Integrated Linear Amplifiers
  • Extensive Software Package

E-725 Digital Piezo Motion Controller For 3-Axis High-Precision Positioning Systems

Physik Instrument E-725 Digital Piezo Motion Controller For 3-Axis High-Precision Positioning Systems

  • Precision Motion Control for Nano Positioning Systems with Capacitive Sensors
  • 3-Channel Version
  • Powerful Digital Controller: DSP 32-bit Floating Point, 225 MHz; 20 kHz Sampling Rate; 24-bit DAC
  • Communication via Ethernet, USB, RS-232
  • 4th Order Polynomial Linearization for Mechanics & Electronics
  • Dynamic Digital Linearization (DDL) Option for Improved Path Accuracy
  • Auto-Loading of Calibration Data from Stage ID-Chip for Interchangeability of Controller and Mechanics
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Optional High-Speed Parallel I/O Interface
  • Flexible Wave Generators
  • Digital I/O Lines for Task Triggering
  • Extensive Software Support

E-710 Multi-Channel Digital Piezo Controller with Dynamic Linearization

Physik Instrument E-710 Multi-Channel Digital Piezo Controller with Dynamic Linearization

  • Precision Motion Control for Piezo Nano Positioning Systems with Capacitive Feedback Sensors
  • 3-, 4- & 6-Channel Versions
  • 32-Bit Digital Filters
  • Hardware and Firmware Linearization
  • Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
  • Optional Dynamic Digital Linearization (Firmware Option) Improves Scanning Linearity
  • ID Chip Support for Automatic Calibration
  • Optional High-Speed Parallel I/O or DSP Interface
  • Optional Analog Input
  • Integrated Linear Amplifiers
  • GCS (General Command Set) Compatible

E-712 Modular Digital Piezo Motion Controller, up to 6 Axes

Physik Instrument E-712 Modular Digital Piezo Motion Controller, up to 6 Axes

  • Digital Motion Controller of the Latest Generation: 600 MHz Processor; up to 50 kHz Sensor Update Rate;
  • Highly Stable 20-bit D/A Converters
  • Real-Time Operating System for Excellent Trajectory Control
  • Modular Design for Greatest Flexibility in Meeting Custom Requirements
  • Auto-Calibrating from Stage ID-Chip for Interchangeability of Controller and Mechanics w/o Recalibration
  • Flexible Interfacing: USB, RS-232 & Ethernet
  • Optional High-Bandwidth Analog Inputs and Outputs

E-664 NanoCube® Piezo Controller

Physik Instrument E-664 NanoCube® Piezo Controller

  • 3 x 14 W Peak Power
  • Closed-Loop Precision Motion Control
  • For P-611 NanoCube® Nano Positioning XYZ Stages

E-760 NanoCube® Piezo Controller Card for F-206 / C-880 Controller

Physik Instrument E-760 NanoCube® Piezo Controller Card for F-206 / C-880 Controller

  • Specially Designed for P-611 NanoCube®and F-206 HexAlign™ 6D Alignment System
  • Built-in Optical Metrology for Automatic Alignment
  • Integrated Linear Amplifiers with 3 x 9 W Peak Power
  • Closed-Loop Precision Motion Control

E-481 High-Power, High-Voltage Piezo Driver / Controller with Energy Recovery

Physik Instrument E-481 High-Power, High-Voltage Piezo Driver / Controller with Energy Recovery

  • High-Voltage Amplifier with 2000 W Peak Power
  • Energy Recovery
  • Output Voltage 0 to ±1000 V and bipolar
  • Optional Position Servo-Motion Controller Module
  • Optional Computer Interface and Display Module
  • Differential Output

E-471 High-Power, Modular High Voltage (1000 V) Piezo Drivers / Controllers

Physik Instrument E-471 High-Power, Modular High Voltage (1000 V) Piezo Drivers / Controllers

  • Integrated Linear High-Voltage Amplifier w/ 550 W Peak Power
  • Output Voltage -3 to -1100 V & Bipolar
  • 1- and 2-Channel Versions
  • Optional Position Servo-Motion Control Modules
  • Optional RS-232 & IEEE 488 Interface Module & Display

E-651 Piezo Controller for Closed-Loop Low-Voltage Piezo (60 V) Multilayer Bender Actuators

Physik Instrument E-651 Piezo Controller for Closed-Loop Low-Voltage Piezo (60 V) Multilayer Bender Actuators

  • Controller for Closed-Loop Multilayer Bimorph Actuators
  • 1- and 2-Channel Versions
  • Integrated Linear Amplifiers
  • Bench-Top & OEM-Board Versions

E-609 OEM Piezo Controller with Digital Servo: Increased Performance for Low-Cost Piezo Systems

Physik Instrument E-609 OEM Piezo Controller with Digital Servo: Increased Performance for Low-Cost Piezo Systems

  • Open-Loop and Closed-Loop Versions
  • Most Cost-Efficient Digital Piezo Motion Controller
  • Servo Tuning and Parameter Setting by Software
  • Digital Algorithms Improve Linearity
  • Analog Control Input for Target Values

E-621 Piezo Amplifier & Servo-Controller Module with 24-Bit USB Interface

Physik Instrument E-621 Piezo Amplifier & Servo-Controller Module with 24-Bit USB Interface

  • 24-Bit USB Interface and High-Speed Analog Interface
  • Notch Filters for Higher Bandwidth
  • Networking for up to 12 Motion Controllers
  • Choice of Sensor Strain Gauge (lower cost) or Capacitive Sensor (higher precision)
  • Table for User-Defined Curves

E-831 OEM Piezo Driver and Power Supply Modules

Physik Instrument E-831 OEM Piezo Driver and Power Supply Modules

  • Cost Effective Piezo Driver
  • Small Size
  • Low Noise, High Stability
  • Easy-to-Use
  • Full Overcurrent, Short-Circuit and Temperature Protection
  • Power-up/down Without Voltage Spikes

E-500 Modular Piezo Motion Controller System, up to 6 Channels, for Low Voltage and High Voltage Piezo Systems

Physik Instrument E-500 Modular Piezo Motion Controller System, up to 6 Channels, for Low Voltage and High Voltage Piezo Systems

  • Modular Piezo Controller System with many Options
  • For High Power Amps to 280 Watts
  • Up to 6 Channels
  • Choice of Linear Amplifier Modules, Low & High Voltage
  • Optional Servo-Motion Controller for Cap Sensors, Strain Sensors and Piezo Resistive Sensors
  • Optional USB Interface, TCP/IP, RS-232
  • Optional Display Module

E-509 Sensor & Position Servo-Control Modules for Piezo-Driven Nanopositioning Systems

Physik Instrument E-509 Sensor & Position Servo-Control Modules for Piezo-Driven Nanopositioning Systems

  • Position Servo-Control for Piezo-Driven Nano Positioning Systems
  • Improves Linearity
  • Eliminates Drift & Hysteresis
  • For Capacitive Sensors, Strain Gauge Sensors & LVDT Sensors
  • Increases Piezo Stiffness
  • Notch Filter for Improved Dynamics

E-503 LVPZT (100 V) Piezo Driver Module, 3 Channels

Physik Instrument E-503 LVPZT (100 V) Piezo Driver Module, 3 Channels

  • Integrated Linear Piezo Amplifiers, 3 x 14 W Peak Power
  • Output Voltage Range -20 to +120 V
  • E-503.00S with 2 amplifier channels and one fixed voltage of +100V

E-505 Piezo Amplifier Module High Power Controller

Physik Instrument E-505 Piezo Amplifier Module High Power Controller

  • 200 W Peak Power
  • Output Voltage Range -20 to 120 V
  • Module for E-500 Piezo Controller Rack
  • Prepared for Position Servo-Motion Control Upgrade (optional)
  • Prepared for Interfaces / Display Modules (optional)

E-536 PicoCube® Piezo Controller

Physik Instrument E-536 PicoCube® Piezo Controller

  • Extremely Low Noise: Resolution to 25 Picometers
  • For P-363 PicoCube® Systems
  • Peak Power 3 x 100 W
  • Ultra-Low Noise
  • Output Voltage ±250 V

E-709 Low-Cost Digital Piezo Motion Controller, 1 Channel

Physik Instrument E-709 Low-Cost Digital Piezo Motion Controller, 1 Channel

  • Flexibility of Digital Signal Processing for the Cost of Analog
  • Digital Closed-Loop Precision Motion Control Algorithms with 10 kHz Sampling Rate
  • For Nano Positioning Systems with Capacitive Sensors and Piezo Resistive Strain Gauge Sensors
  • Linearity to 0.02%
  • USB and RS-232 Interfaces
  • Fast 25 Mbit/s Serial Interface
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Analog Output, e.g. for External Amplifiers
  • Low-Cost OEM-Versions Available
  • Fast Digital Controller, Software-Configurable Servo Parameters
  • Parameter Input Using Software

E-621 Piezo Amplifier & Servo-Controller Module with 24-Bit USB Interface

Physik Instrument E-621 Piezo Amplifier & Servo-Controller Module with 24-Bit USB Interface

  • Closed-Loop Precision Motion Controller for Nano Positioning Systems
  • 24-Bit USB Interface and High-Speed Analog Interface
  • Notch Filters for Higher Bandwidth
  • Networking for up to 12 Controllers
  • Choice of Sensor Strain Gauge (lower cost) or Capacitive Sensor (higher precision)
  • Table for User-Defined Curves

E-610 LVPZT (100 V) Piezo Driver & Position Servo-Controller Modules, OEM Version

Physik Instrument E-610 LVPZT (100 V) Piezo Driver & Position Servo-Controller Modules, OEM Version

  • Closed-Loop Precision Motion Controller for Nano Positioning Systems
  • Open-Loop Version Available (lower Cost)
  • For Piezo Nano Positioners with Capacitive & Strain Gauge Sensors
  • Integrated Linear Amplifier, 14 W Peak Power
  • Runs on Single Stabilized Voltage (12 to 30 VDC)

E-665 Piezo Servo-Controller with 24 Bit High-Speed USB Interface

Physik Instrument E-665 Piezo Servo-Controller with 24 Bit High-Speed USB Interface

  • Closed-Loop Precision Motion Controller for Nano Positioning Systems
  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Network Capability with up to 12 Channels
  • Integrated Linear Piezo Driver with 36 W Peak Power
  • For Piezo Sytems with SGS and Capacitive Sensor Feedback
  • Table for User-Defined Curves
  • GCS (General Command Set) Compatible
  • UL and CSA certified

E-625 Compact Piezo Servo-Controller with 24 Bit High-Speed USB Interface

Physik Instrument E-625 Compact Piezo Servo-Controller with 24 Bit High-Speed USB Interface

  • Closed-Loop Precision Motion Controller for Nano Positioning Systems
  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Integrated Linear Piezo Driver, 14 W Peak Power
  • Network Capability with up to 4 Channels
  • For Piezo Systems with Capacitive and Strain Gauge Position Feedback Sensors
  • Wave Table for User-Defined Curves
  • GCS (General Command Set) Compatible

E-753 High-Speed Digital Piezo NanoAutomation® Controller

Physik Instrument E-753 High-Speed Digital Piezo NanoAutomation® Controller

  • Next Generation Digital Piezo Motion Controller Provides Higher Flexibility, Accuracy and Speed
  • 100 kHz Sensor Sampling; 32-bit Floating Point DSP; 24-bit Low-Noise D/A Converters
  • Ethernet (TCP/IP) Interface for Remote Control Capability, RS-232
  • Automatic Calibration Data Coaching from Stage ID-Chip
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Digital I/O Lines for Triggering Tasks
  • Extensive Software Support
  • For Nanopositioning Systems with Capacitive Sensors

E-861 High-Speed Digital Piezo PiezoWalk® NEXACT® Motion Controller/Driver

Physik Instrument E-861 High-Speed Digital Piezo PiezoWalk® NEXACT® Motion Controller/Driver

  • For NEXACT® Piezo Motor Drives and Nano Positioning Systems
  • Complete System with Controller, Integrated Power Amplifiers and Software
  • Open-Loop Operation, or Closed-Loop with Linear Encoder
  • High Performance at Low Cost
  • Daisy-Chain Networking for Multi-Axis Operation
  • Non-Volatile Macro Storage for Stand-Alone Functionality with Autostart Macro
  • I/O for Automation, Joystick for Manual Operation
  • Parameter Changes On-the-Fly

E-530 Piezo Power Supply Accessories

Physik Instrument E-530 Piezo Power Supply Accessories

  • Included in E-500 Chassis
  • Provides Power for all E-500-Installable Modules
  • 90-264 VAC Operating Range

E-709: Affordable High Performance Digital Piezo Controller

Physik Instrument E-709: Affordable High Performance Digital Piezo Controller

  • F^3 Capablility: Fast Focus & Freeze
  • Choice of Sensors: Piezoresistive (lower cost) or capacitive (higher performance)
  • 5th order polynomial digital linearization ensures accuracy.
  • Two notch filters facilitate crisp, high-gain actuation.
  • High Speed servo update rate ensures responsiveness.
  • DAC-in-the-loop architecture guarantees positional stability.
  • Host of fast interfaces including USB, RS-232, Real Time Analog and TTL interfaces.
  • Easy-to-use setup software requires no physical access to the unit. No trimpots!
  • Extensive, well-documented, interface-independent software support includes Windows .dll, Linux .so, and LabVIEW .llbs
  • Broad, robust waveform generation, data-recording and triggering capabilities come standard.

E-625 Compact Piezo Servo-Controller with 24 Bit High-Speed USB Interface

Physik Instrument E-625 Compact Piezo Servo-Controller with 24 Bit High-Speed USB Interface

  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Network Capability with up to 4 Channels
  • For Capacitive, LVDT and Strain Gauge Position Sensors
  • Wave Table for User-Defined Curves
  • GCS (General Command Set) Compatible

E-665 Piezo Servo-Controller with 24 Bit High-Speed USB Interface

Physik Instrument E-665 Piezo Servo-Controller with 24 Bit High-Speed USB Interface

  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Network Capability with up to 12 Channels
  • Piezo Driver with 36 W Peak Power
  • SGS, LVDT and Capacitive Sensor Servo-Control
  • Table for User-Defined Curves
  • GCS (General Command Set) Compatible
  • UL and CSA certified

E-761 Digital Piezo Controller

Physik Instrument E-761 Digital Piezo Controller

  • Winner of the SEMI Technology Innovation Showcase Award
  • 20 mm Travel Range, <0.1 Nanometer Resolution (Open-Loop)
  • Integrated High-Resolution Incremental Encoder (Closed-Loop)
  • Active Force Generation to 400 N
  • >600 N Holding Force, Self-Locking

For more information about these products…
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