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Controllers & Drivers

The performance and usability of a precision positioning system depends on the mechanics, motion control electronics, and software. We offer Physik Instrument Controllers for traditional piezo actuated nano-positioning systems, as well as motorized positioning systems based on linear motors, brushless motors, servo motors, and stepper motors.  In addition, novel controllers for ultrasonic motors, stick-slip motors, and PiezoWalk motors are also available from PI.

Product Lineup

Piezo Controllers & Drivers

E-712.1AM Digital Motion Controller

For NEXLINE® Piezo Walking Drives, 1 Axis

Physik Instrument E-712.1AM Digital Motion Controller

  • Special control algorithms for NEXLINE® nanopositioning linear-motor actuators
  • Highly stable 20-bit D/A converter
  • Servo frequency 50 kHz
  • Flexible interfaces: TCP/IP, USB, RS-232
  • Wave generator
  • Data recorder
E-862 Low-Cost NEXACT® Piezo Motor Driver

Physik Instrument E-862 Low-Cost NEXACT® Piezo Motor Driver

  • For NEXACT® piezo motor drives & nano positioning Stages
  • Combined step generator and power amplifier
  • Cost-effective design
  • Interface for automation, joystick for manual operation
E-872 Stick-Slip Piezo Driver/Controller

For Open-Loop Piezo-Ratchet Actuators / Q-Motion Stages

Physik Instrument E-872 Stick-Slip Piezo Driver/Controller

  • Integrated power amplifier and voltage generator for piezo inertia drives
  • OEM driver available
  • Serial control of up to 4 stages and actuators by one unit
  • TCP/IP, USB, USB for joystick, digitial I/O
E-873 Servo Controller

For Closed-Loop Piezo-Ratchet Actuators / Q-Motion Stages

Physik Instrument E-873 Servo Controller

  • Integrated power amplifier and voltage generator for piezo inertia drives
  • TCP/IP, USB, RS-232
  • Extensive software support: LabVIEW, MATLAB, C / C++ / C# / VB.NET, Python
  • Optional joystick for manual operation
E-709 Low-Cost Digital Servo Piezo Motion Controller, 1 Channel

Physik Instrument E-709 Low-Cost Digital Servo Piezo Motion Controller, 1 Channel

  • Flexibility of Digital Signal Processing and Control for the Cost of Analog
  • Digital Motion Control Algorithms with 10 kHz Sampling Rate
  • For Capacitive Sensors and Piezo Resistive Strain Gauge Sensors
  • Linearity to 0.02%
  • USB and RS-232 Interfaces
  • Fast 25 Mbit/s Serial Interface
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Analog Output, e.g. for External Amplifiers
  • Low-Cost OEM-Versions Available
  • Fast Digital Controller, Software-Configurable Servo Parameters
  • Parameter Input Using Software
E-709.1C1L Next Gen Compact Piezo Controller

For 1 Axis Closed-loop Piezo Mechanisms
Physik Instrument E-709.1C1L Next Gen Compact Piezo Controller

  • Digital servo for advanced control
  • 20 kHz sampling rate / control bandwidth
  • 24 Bit DAC, 19 bit sensor resolution
  • For capacitive feedback sensors
  • Interfaces: USB, SPI, and RS-232
  • Additional analog control input
  • Linearity to 0.01%
  • 28W peak power
E-727 Low-Cost Multi-Axis Digital Servo Motion Controller

For 3/4 Axis Closed-Loop Piezo Mechanisms
Physik Instrument E-727 Low-Cost Multi-Axis Digital Servo Motion Controller

  • Digital servo for advanced control algorithms
  • 25 kHz control bandwidth
  • For capacitive and piezo-restive strain gauge feedback sensors
  • Optional high resolution analog control inputs and outputs
  • Interfaces: Ethernet, USB, and RS-232
  • Digital inputs and outputs
E-754 Reference Class Digital Piezo Controller

For 1 Axis Closed-Loop Piezo Mechanisms
Physik Instrument E-754 Reference Class Digital Piezo Controller

  • 50kHz servo loop
  • 22-Bit DAC resolution
  • 20-Bit analog input
  • 45W peak power, 500mA peak current
  • Extensive software package
  • Ethernet (TCP/IP), SPI, USB, RS-232 interfaces
E-712 Modular Digital Piezo Motion Controller, up to 6 Axes

Physik Instrument E-712 Modular Digital Piezo Motion Controller, up to 6 Axes

  • Digital Motion Controller of the Latest Generation: 600 MHz Processor; up to 50 kHz Sensor Update Rate;
  • Highly Stable 20-bit D/A Converters
  • Real-Time Operating System for Excellent Trajectory Control
  • Modular Design for Greatest Flexibility in Meeting Custom Requirements
  • Auto-Calibrating from Stage ID-Chip for Interchangeability of Controller and Mechanics w/o Recalibration
  • Flexible Interfacing: USB, RS-232 & Ethernet
  • Optional High-Bandwidth Analog Inputs and Outputs
E-616 Analog Motion Controller

For Multi-Axis Piezo Tip/Tilt Mirrors and Platforms
Physik Instrument E-616 Analog Motion Controller

  • Precision motion control for piezo nano positioning systems
  • Bench-top and OEM versions
  • Three integrated amplifiers provide up to 10W peak power
  • Closed-loop and open-loop versions
  • Internal coordinate transformation simplifies control of parallel kinematics designs (tripod & differential drive)
  • Compact and cost-effective design for OEMs or bench-top
E-664 NanoCube® Piezo Controller

Physik Instrument E-664 NanoCube® Piezo Controller

  • 3 x 14 W Peak Power
  • Closed-Loop Precision Motion Control
  • For P-611 NanoCube® Nano Positioning XYZ Stages
E-536 PicoCube® Piezo Controller

Physik Instrument E-536 PicoCube® Piezo Controller

  • Extremely Low Noise: Resolution to 25 Picometers
  • For P-363 PicoCube® Systems
  • Peak Power 3 x 100 W
  • Ultra-Low Noise
  • Output Voltage ±250 V
E-618 / E-619 High-Power Piezo Driver/Controller, -30 to 130V

High Bandwidth, Linear and Switched with Energy Recovery
Physik Instrument E-618 / E-619 High-Power Piezo Driver/Controller, -30 to 130V

  • 1200W peak power, 10A peak current (switched)
  • 3200W peak power, 20A peak current (linear)
  • Output voltage -30 to 130V
  • Optional position servo-motion controller module
  • Optional computer interface and display module
  • Bandwidth to 20kHz for high dynamics applications
E-617 High-Power Piezo Driver, -30 to 130V

Linear Amplifier, OEM Module
Physik Instrument E-617 High-Power Piezo Driver, -30 to 130V

  • 280W peak power, 2A peak current
  • Output voltage -30 to 130V
  • OEM module & top hat rail module
  • 3.5khz bandwidth
E-482/E-481/E-470 High-Power Piezo Driver/Controller

0 to 1050V and ±500V, Linear and Switched Models
Physik Instrument E-482/E-481/E-470 High-Power Piezo Driver/Controller

  • High-voltage amplifier up to 6kW peak power
  • Linear amps and switched amps with energy recovery
  • Output voltage 0 to 1050V and bipolar
  • Optional position servo-motion controller module
  • Optional computer interface and display module
  • Differential output
E-651 Piezo Controller for Closed-Loop Low-Voltage Piezo (60 V) Multilayer Bender Actuators

Physik Instrument E-651 Piezo Controller for Closed-Loop Low-Voltage Piezo (60 V) Multilayer Bender Actuators

  • Controller for Closed-Loop Multilayer Bimorph Actuators
  • 1- and 2-Channel Versions
  • Integrated Linear Amplifiers
  • Bench-Top & OEM-Board Versions
E-650 Piezo Drivers

For Low-Voltage Piezo (60V) Multilayer Bender Actuators
Physik Instrument E-650 Piezo Drivers

  • Specifically designed to drive multilayer bimorph piezo actuators
  • Bench-top and OEM versions
  • Integrated Llnear amplifier w/ up to 18W peak power
  • LCD voltage display
  • Output voltage ±30V or 0 to 60V and separate fixed voltage
E-609 OEM Piezo Controller with Digital Servo: Increased Performance for Low-Cost Piezo Systems

Physik Instrument E-609 OEM Piezo Controller with Digital Servo: Increased Performance for Low-Cost Piezo Systems

  • Open-Loop and Closed-Loop Versions
  • Most Cost-Efficient Digital Piezo Motion Controller
  • Servo Tuning and Parameter Setting by Software
  • Digital Algorithms Improve Linearity
  • Analog Control Input for Target Values
E-413 Compact Piezo Driver

For DuraAct™ Patch Transducers and PICA™ Shear Piezo Actuators
Physik Instrument E-413 Compact Piezo Driver

  • Peak power to 50W
  • Output voltage to +/-250V
  • OEM module / bench-top for PICA™ shear actuators
  • OEM module for DuraAct™ piezoelectric patch transducers
Low-Power High Voltage Driver (1000V)

Benchtop and OEM Module
Physik Instrument Low-Power High Voltage Driver (1000V)

  • Runs on 12V: battery or p/s operation
  • Single channel high voltage piezo driver
  • Output voltage range +10 to +1000V
E-500 Modular Piezo Motion Controller System, up to 6 Channels, for Low Voltage and High Voltage Piezo Systems

Physik Instrument E-500 Modular Piezo Motion Controller System, up to 6 Channels, for Low Voltage and High Voltage Piezo Systems

  • Modular Piezo Controller System with many Options
  • For High Power Amps to 280 Watts
  • Up to 6 Channels
  • Choice of Linear Amplifier Modules, Low & High Voltage
  • Optional Servo-Motion Controller for Cap Sensors, Strain Sensors and Piezo Resistive Sensors
  • Optional USB Interface, TCP/IP, RS-232
  • Optional Display Module
E-506 Linearized Piezo Driver

Physik Instrument E-506 Linearized Piezo Driver

  • Highly linear amplifier module
  • 280W peak power
  • Output voltage range -30 to 130V
  • Module for E-500 piezo controller rack
  • Prepared for position servo-motion control upgrade (optional)
  • Prepared for interfaces / display modules (optional)
E-665 Piezo Servo-Controller with 24 Bit High-Speed USB Interface

Physik Instrument E-665 Piezo Servo-Controller with 24 Bit High-Speed USB Interface

  • Closed-Loop Precision Motion Controller for Nano Positioning Systems
  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Network Capability with up to 12 Channels
  • Integrated Linear Piezo Driver with 36 W Peak Power
  • For Piezo Sytems with SGS and Capacitive Sensor Feedback
  • Table for User-Defined Curves
  • GCS (General Command Set) Compatible
  • UL and CSA certified
E-625 Compact Piezo Servo-Controller with 24 Bit High-Speed USB Interface

Physik Instrument E-625 Compact Piezo Servo-Controller with 24 Bit High-Speed USB Interface

  • Closed-Loop Precision Motion Controller for Nano Positioning Systems
  • Integrated 24-Bit High-Speed USB & RS-232 Interfaces
  • Integrated Linear Piezo Driver, 14 W Peak Power
  • Network Capability with up to 4 Channels
  • For Piezo Systems with Capacitive and Strain Gauge Position Feedback Sensors
  • Wave Table for User-Defined Curves
  • GCS (General Command Set) Compatible
E-663 Low Voltage (100V) Piezo Driver

3 Channels
Physik Instrument E-663 Low Voltage (100V) Piezo Driver

  • 3 independent output channels
  • Integrated linear amplifiers, 3 x 14W peak power
  • 3 LED voltage displays
  • Output voltage range – 20 to 120V
E-464 High-Voltage Piezo Driver (1000V)

3 Channels
Physik Instrument E-464 High-Voltage Piezo Driver (1000V)

  • 3 independent channels
  • Integrated linear amplifiers, 3 x 25W peak power
  • 3 LED voltage displays
  • Output voltage range 0 to + 1000V
E-861 High-Speed Digital Piezo PiezoWalk® NEXACT® Motion Controller/Driver

Physik Instrument E-861 High-Speed Digital Piezo PiezoWalk® NEXACT® Motion Controller/Driver

  • For NEXACT® Piezo Motor Drives and Nano Positioning Systems
  • Complete System with Controller, Integrated Power Amplifiers and Software
  • Open-Loop Operation, or Closed-Loop with Linear Encoder
  • High Performance at Low Cost
  • Daisy-Chain Networking for Multi-Axis Operation
  • Non-Volatile Macro Storage for Stand-Alone Functionality with Autostart Macro
  • I/O for Automation, Joystick for Manual Operation
  • Parameter Changes On-the-Fly
E-471 High-Power, Modular High Voltage (1000 V) Piezo Drivers / Controllers

Physik Instrument E-471 High-Power, Modular High Voltage (1000 V) Piezo Drivers / Controllers

  • Integrated Linear High-Voltage Amplifier w/ 550 W Peak Power
  • Output Voltage -3 to -1100 V & Bipolar
  • 1- and 2-Channel Versions
  • Optional Position Servo-Motion Control Modules
  • Optional RS-232 & IEEE 488 Interface Module & Display
E-481 High-Power, High-Voltage Piezo Driver / Controller with Energy Recovery

Physik Instrument E-481 High-Power, High-Voltage Piezo Driver / Controller with Energy Recovery

  • High-Voltage Amplifier with 2000 W Peak Power
  • Energy Recovery
  • Output Voltage 0 to ±1000 V and bipolar
  • Optional Position Servo-Motion Controller Module
  • Optional Computer Interface and Display Module
  • Differential Output
E-710 Multi-Channel Digital Piezo Controller with Dynamic Linearization

Physik Instrument E-710 Multi-Channel Digital Piezo Controller with Dynamic Linearization

  • Precision Motion Control for Piezo Nano Positioning Systems with Capacitive Feedback Sensors
  • 3-, 4- & 6-Channel Versions
  • 32-Bit Digital Filters
  • Hardware and Firmware Linearization
  • Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
  • Optional Dynamic Digital Linearization (Firmware Option) Improves Scanning Linearity
  • ID Chip Support for Automatic Calibration
  • Optional High-Speed Parallel I/O or DSP Interface
  • Optional Analog Input
  • Integrated Linear Amplifiers
  • GCS (General Command Set) Compatible
E-725 Digital Piezo Motion Controller For 3-Axis High-Precision Positioning Systems

Physik Instrument E-725 Digital Piezo Motion Controller For 3-Axis High-Precision Positioning Systems

  • Precision Motion Control for Nano Positioning Systems with Capacitive Sensors
  • 3-Channel Version
  • Powerful Digital Controller: DSP 32-bit Floating Point, 225 MHz; 20 kHz Sampling Rate; 24-bit DAC
  • Communication via Ethernet, USB, RS-232
  • 4th Order Polynomial Linearization for Mechanics & Electronics
  • Dynamic Digital Linearization (DDL) Option for Improved Path Accuracy
  • Auto-Loading of Calibration Data from Stage ID-Chip for Interchangeability of Controller and Mechanics
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Optional High-Speed Parallel I/O Interface
  • Flexible Wave Generators
  • Digital I/O Lines for Task Triggering
  • Extensive Software Support
E-753 Ultra-High Performance Digital Piezo Motion Controller, 1 Channel

Physik Instrument E-753 Ultra-High Performance Digital Piezo Motion Controller, 1 Channel

  • Next Generation Digital Motion Controller for Nano Positionning Provides Higher Flexibility, Accuracy and Speed
  • 100 kHz Sensor Sampling; 32-bit Floating Point DSP; 24-bit Low-Noise D/A Converters
  • Ethernet (TCP/IP) Interface for Remote Control Capability, RS-232
  • Auto-Loading of Calibration Data from Stage ID-Chip for Interchangeability of Controller and Mechanics
  • Additional High-Bandwidth Analog Control Input / Sensor Input
  • Digital I/O Lines for Task Triggering
  • Extensive Software Support
  • For Nanopositioning Systems with Capacitive Sensors
E-761 3-Channel Digital Piezo Motion Controller for Nanopositioning in PCI-Board Format

Physik Instrument E-761 3-Channel Digital Piezo Motion Controller for Nanopositioning in PCI-Board Format

  • For Closed-Loop Piezoelectric Nanopositioning Systems with Capacitive Sensors
  • High-Speed PCI Interface
  • Additional High-Bandwidth Analog Interface
  • 32-Bit Digital Filters
  • 24-Bit DAC Resolution
  • 2 Linearization Systems
  • Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
  • ID-Chip Support for Automatic Calibration
  • Integrated Linear Amplifiers
  • Extensive Software Package
Entry-Level High Performance Open-Loop Piezo Driver

Physik Instrument Entry-Level High Performance Open-Loop Piezo Driver

  • Cost-efficient piezo driver
  • High output power for dynamic operation: up to 100mA source and sink current
  • -30 to 130V output voltage
  • Power supply included

Modules & Accessories

E-621 Piezo Amplifier & Servo-Controller Module with 24-Bit USB Interface

Physik Instrument E-621 Piezo Amplifier & Servo-Controller Module with 24-Bit USB Interface

  • 24-Bit USB Interface and High-Speed Analog Interface
  • Notch Filters for Higher Bandwidth
  • Networking for up to 12 Motion Controllers
  • Choice of Sensor Strain Gauge (lower cost) or Capacitive Sensor (higher precision)
  • Table for User-Defined Curves
E-610 LVPZT (100 V) Piezo Driver & Position Servo-Controller Modules, OEM Version

Physik Instrument E-610 LVPZT (100 V) Piezo Driver & Position Servo-Controller Modules, OEM Version

  • Closed-Loop Precision Motion Controller for Nano Positioning Systems
  • Open-Loop Version Available (lower Cost)
  • For Piezo Nano Positioners with Capacitive & Strain Gauge Sensors
  • Integrated Linear Amplifier, 14 W Peak Power
  • Runs on Single Stabilized Voltage (12 to 30 VDC)
E-836 Low-Cost OEM Piezo-Driver Module & Benchtop

With Integrated High-Voltage Power Supply
Physik Instrument E-836 Low-Cost OEM Piezo-Driver Module & Benchtop

  • Open-loop driver
  • PCB-mount possible
  • 100 mA peak current for dynamic piezo operation
  • Integrated high voltage power supply, requires one 24V source to operate
  • Low noise, high stability
  • Full overcurrent, short-circuit and temperature protection
E-831 OEM Piezo Driver and Power Supply Modules

Physik Instrument E-831 OEM Piezo Driver and Power Supply Modules

  • Cost Effective Piezo Driver
  • Small Size
  • Low Noise, High Stability
  • Easy-to-Use
  • Full Overcurrent, Short-Circuit and Temperature Protection
  • Power-up/down Without Voltage Spikes
E-509 Sensor & Position Servo-Control Modules for Piezo-Driven Nanopositioning Systems

Physik Instrument E-509 Sensor & Position Servo-Control Modules for Piezo-Driven Nanopositioning Systems

  • Position Servo-Control for Piezo-Driven Nano Positioning Systems
  • Improves Linearity
  • Eliminates Drift & Hysteresis
  • For Capacitive Sensors, Strain Gauge Sensors & LVDT Sensors
  • Increases Piezo Stiffness
  • Notch Filter for Improved Dynamics
E-518 Computer Interface and Display Module

For Modular Piezo Controllers
Physik Instrument E-518 Computer Interface and Display Module

  • Low-noise 24-bit D/A converter
  • Sample rate 25kHz
  • TCP/IP, USB, and RS-232 interfaces
  • 6-Digit display for voltage and position
  • 1- & 3-channel versions
  • Wave generator with programmable trigger-I/O
E-503 LVPZT (100 V) Piezo Driver Module, 3 Channels

Physik Instrument E-503 LVPZT (100 V) Piezo Driver Module, 3 Channels

  • Integrated Linear Piezo Amplifiers, 3 x 14 W Peak Power
  • Output Voltage Range -20 to +120 V
  • E-503.00S with 2 amplifier channels and one fixed voltage of +100V
E-504 High Power Piezo Driver Module

Physik Instrument E-504 High Power Piezo Driver Module

  • Peak power 280W
  • High average output power 100W
  • Very energy efficient through energy recovery
  • Output voltage range -30 to 130V
  • Module for E-500 piezo controller rack
  • Prepared for position servo-control upgrade (optional)
E-505 Piezo Amplifier Module High Power Controller

Physik Instrument E-505 Piezo Amplifier Module High Power Controller

  • 200 W Peak Power
  • Output Voltage Range -20 to 120 V
  • Module for E-500 Piezo Controller Rack
  • Prepared for Position Servo-Motion Control Upgrade (optional)
  • Prepared for Interfaces / Display Modules (optional)
E-508 High-Voltage Piezo Driver (1000V) Module

Physik Instrument E-508 High-Voltage Piezo Driver (1000V) Module

  • Integrated linear amplifier, up to 400W peak power
  • Output voltage Range +3 to +1100V & bipolar
  • ±250V for shear actuators
E-760 NanoCube® Piezo Controller Card for F-206 / C-880 Controller

Physik Instrument E-760 NanoCube® Piezo Controller Card for F-206 / C-880 Controller

  • Specially Designed for P-611 NanoCube®and F-206 HexAlign™ 6D Alignment System
  • Built-in Optical Metrology for Automatic Alignment
  • Integrated Linear Amplifiers with 3 x 9 W Peak Power
  • Closed-Loop Precision Motion Control
E-530 Piezo Power Supply Accessories

Physik Instrument E-530 Piezo Power Supply Accessories

  • Included in E-500 Chassis
  • Provides Power for all E-500-Installable Modules
  • 90-264 VAC Operating Range

For more information about these products…
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