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Hexapod Precision Motion Platforms

Hexapod 6-axis parallel positioners are often referred to as Stewart Platforms. A hexapod is based on a 6-axis (XYZ, Pitch, Roll, Yaw) actuator system arranged in parallel between a top and bottom platform. PI’s parallel kinematics (PKM) precision positioning systems have many advantages over conventional serial kinematics stages, including lower inertia, improved dynamics, smaller package size and higher stiffness. The user-programmable pivot point – integral to PI hexapod motion controllers provides additional benefits, especially in alignment applications of lenses, optics and fiber optic components.

Product Lineup

H-811 Miniature Hexapod

Brushless DC Motors
PI-H-811.I2/I2V 6-Axis Miniature Hexapod

  • 34x32x13mm XYZ travel
  • 20x20x41° rotary travel
  • 5kg load
  • 5nm actuator resolution
  • 10mm/sec max. velocity
  • Ø136mm base, 114mm height

H-810 Miniature Hexapod

Smallest Hexapod w/ BLDC Motors
PI - H-810 6-Axis Miniature Hexapod

  • 40x40x13mm XYZ travel
  • 20x20x60° rotary travel
  • 3kg load
  • 5nm actuator resolution
  • 6mm/sec max. velocity
  • Ø100mm base, 118mm height

H-811.S High Dynamics Hexapod

Motion Simulation / Stabilization
PI-H-811.S High Dynamics Hexapod

  • CIPA certified for camera testing
  • Dynamics to 25Hz / 0.1°
  • 25mm/sec
  • 80nm actuator resolution
  • Controller with wave generator
  • Ø136mm base, 114mm height

H-811.I2V Vacuum-Compatible 6-Axis Miniature Hexapod

Fast, Compact, and Highly Precise
Physik Instrument H-811.I2V Vacuum-Compatible 6-Axis Miniature Hexapod

  • Travel ranges to ±17 mm / ±21°
  • Load capacity to 5 kg
  • Repeatability to ±0.06 µm
  • Velocity to 10 mm/s
  • Vacuum compatible to 10-6 hPa

H-824 Compact Hexapod

Low Cost, Low Profile
PI-H-824 6-Axis Hexapod

  • 45x45x25mm XYZ travel
  • 15x15x25° rotary travel
  • 10kg & 5kg load
  • 7nm & 500nm actuator resolution
  • 1mm/sec & 25mm/sec max. velocity
  • Ø281mm base, 190mm height

H-824.V Vacuum-Compatible 6-Axis Hexapod

Compact and Precise
Physik Instrument H-824.V Vacuum-Compatible 6-Axis Hexapod

  • Load capacity to 5 kg, self-locking version
  • Travel ranges to 45 mm / 25°
  • Minimum incremental motion to 0.3 µm
  • Repeatability to ±0.1 µm / ±2 µrad
  • Velocity to 12.5 mm/s

H-825 Compact Hexapod

BLDC Motors, Absolute Encoders
PI-H-825 Compact Hexapod

  • 55x50x28mm XYZ travel
  • 23x28x38° rotary travel
  • 30kg & 5kg load
  • 8nm & 250nm actuator resolution
  • 2mm/sec & 20mm/sec max. velocity
  • Ø281mm base, 190mm height

H-840 Hexapod w/Absolute Encoder

High Dynamics, Brushless Motors
PI-H-840 Hexapod w/Absolute Encoder

  • 100x100x50mm XYZ travel
  • 30x30x60° rotary travel
  • 30kg & 10kg load
  • 8nm & 250nm actuator resolution
  • 2mm/sec & 60mm/sec max. velocity
  • Ø348mm base, 328mm height

H-820 Low-Cost Hexapod

BLDC Motors
Physik Instrument-H-820 6-Axis Hexapod Cost-Effective Hexapod

  • Six degrees of freedom, travel ranges to 100 mm / 60°
  • Load capacity up to 20 kg
  • Velocity when fully loaded to 20 mm/s
  • Repeatability to ±0.5 µm
  • Works in any orientation
  • Fast response behavior

H-206 Fiber Alignment Hexapod

Flexure Joints for Zero Backlash
Physik Instrument-H-206 6-Axis Alignment

  • Up to 13mm linear travel
  • Up to 13° rotary travel
  • 1.5kg load
  • 33nm actuator resolution
  • 8mm/sec max. velocity
  • 220x228mm base, 158mm height

H-850 250kg Hexapod

Gear & Direct Drive, BLDC
PI-H-850 250kg Hexapod

  • 100x100x50mm XYZ travel
  • 30x30x60° rotary travel
  • 250kg & 50kg load
  • 2nm & 50nm actuator resolution
  • .5mm/sec & 8mm/sec max. velocity
  • Ø348mm base, 328mm height

H-850.V Vacuum-Compatible 6-Axis Hexapod

For loads to 80 kg
Physik Instrument H-850.V Vacuum-Compatible 6-Axis Hexapod

  • Load capacity to 80 kg
  • Repeatability to ±0.2 µm
  • Travel ranges to ±50 mm / ±30°
  • Works in any orientation

H-855 500kg Hexapod Family

Self Locking to 5000N
PI-H-855 500kg Hexapod Family

  • 200x200x100mm linear travel
  • 50x50x80° rotary travel
  • 500kg load
  • 4.5mm & 2deg/sec max. velocity
  • Ø560mm base, 480mm height

H-860 Fast “Shaker Hexapod”

Voice Coils, Flexures, Carbon Fiber
PI-H-860 Fast “Shaker Hexapod”

  • 15mm XYZ travel
  • 8° rotary travel
  • 1kg load
  • 5nm actuator resolution
  • 250mm/sec / 4g acceleration
  • Frictionless flexure guides

H-900KSCO Dynamics Hexapod

60kg, 80mm/sec BLDC
PI-H-900KSCO Dynamics Hexapod

  • 200x200x170mm XYZ travel
  • 66x66x66° rotary travel
  • 60kg load
  • 580nm actuator resolution
  • 80mm/sec max. velocity
  • Motion simulation: ISO20672, ISO8728, ISO 16328

H-845 1000kg Hexapod

PI-H-845 1000kg Hexapod

  • To 340x340x210mm XYZ travel
  • To 40x40x60° rotary travel
  • To 1000kg load
  • 40nm actuator resolution
  • 20 to 50mm/sec max. velocity
  • Ø750mm base, 663mm height

P-911 6-Axis UHV Hexapod

Piezo Motor, Non Magnetic
Physik Instrument-P-911 6-Axis UHV Hexapod

  • 3x3x3mm XYZ travel
  • 2x2x2° rotary travel
  • UHV-compatible to 10-9 hPa
  • 1.5kg load
  • Ø100mm base, 90mm height

M-850KHTH High Load Hexapod

1000kg, Ø500mm Aperture
Physik Instrument-M-850KHTH High Load Hexapod

  • 400x400x200mm XYZ travel
  • 40x40x10° rotary travel
  • 1000kg load, any orientation
  • 0.8µm / 0.5µrad resolution
  • 1mm/sec max. velocity
  • Ø900mm base, 714mm height

M-850.K102 High Load Hexapod

Vacuum Compatible, 1000kg
Physik Instrument-M-850.K102 High Load Hexapod

  • 24x24x24mm XYZ travel
  • 6x6x8° rotary travel
  • 1000kg load
  • 2µm repeatability
  • .5mm/sec max. velocity
  • Ø1000mm base, 500mm height

H-850KMLx 500kg Hexapod

Self Locking to 4000N
Physik Instrument-H-850KMLx 500kg Hexapod

  • 100x10x50mm XYZ travel
  • 30x30x60° rotary travel
  • 500kg load
  • Absolute encoder option
  • .5mm/sec max. velocity
  • Ø410mm base, 362mm height

M-850KLAH Large Aperture Hexapod

640x820mm Aperture
Physik Instrument-M-850KLAH Large Aperture Hexapod

  • 50x50x50mm XYZ travel
  • 10x10x10° rotary travel
  • 200kg load
  • 2mm/sec max. velocity
  • 1000x840x400mm

P-587 Nano-Positioning Stage

6-Axis, Parallel Metrology
Physik Instrument-P-587 Nono-Positioning Stage

  • For scanning and positioning in X, Y, Z, θX, θY, θZ
  • 800 µm × 800 µm × 200 µm linear travel range
  • Up to 1 mrad rotational angle
  • Parallel kinematics for faster response times and higher multi-axis accuracy
  • Capacitive sensors for highest linearity
  • Outstanding lifetime due to PICMA® piezo actuators
  • Zero-play, high-precision flexure guide system
  • Active compensation in all 6 degrees of freedom

P-562 Nano-Positioning Stage

6-Axis, Parallel Metrology
Physik Instrument-P-562 Nono-Positioning Stage

  • 200x200x200µm XYZ travel
  • 1x1x1mrad rotary travel
  • Flexure guided
  • 1nm sensor resolution
  • Up to 190Hz resonant frequency
  • 150x150x30mm, 66mm Aperture

P-915KWEF Piezo Hexapod

Direct Drive, Stiff, Ultra-Fast
Physik Instrument-P-915KWEF Piezo Hexapod

  • 70µm XYZ travel
  • 0.08×0.08×0.08° rotary travel
  • 0.2nm repeatability
  • Up to 1.7kHz resonant frequency
  • Ø135mm base, 50mm height

For more information about these products…
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