Hexapod Precision Motion Platforms

Achieve Greater Accuracy in Complex Motion and Alignment Applications

Hexapod 6-axis parallel positioners are often referred to as Stewart Platforms. A Physik Instrument hexapod is based on a 6-axis (XYZ, Pitch, Roll, Yaw) actuator system arranged in parallel between a top and bottom platform. PI’s parallel kinematics (PKM) precision positioning systems have many advantages over conventional serial kinematics stages, including lower inertia, improved dynamics, smaller package size and higher stiffness. The user-programmable pivot point – integral to PI hexapod motion controllers provides additional benefits, especially in alignment applications of lenses, optics and fiber optic components.

Explore Physik Instrumente Precision Motion and Positioning Systems

H-811 Miniature Hexapod

Brushless DC Motors

34x32x13mm XYZ travel
20x20x41° rotary travel
5kg load
5nm actuator resolution
10mm/sec max. velocity
Ø136mm base, 114mm height

H-810 Miniature Hexapod

Smallest Hexapod w/ BLDC Motors

40x40x13mm XYZ travel
20x20x60° rotary travel
3kg load
5nm actuator resolution
6mm/sec max. velocity
Ø100mm base, 118mm height

H-811.S High Dynamics Hexapod

Motion Simulation / Stabilization

CIPA certified for camera testing
Dynamics to 25Hz / 0.1°
25mm/sec
80nm actuator resolution
Controller with wave generator
Ø136mm base, 114mm height

H-811.I2V Vacuum-Compatible 6-Axis Miniature Hexapod

Fast, Compact, and Highly Precise

Travel ranges to ±17 mm / ±21°
Load capacity to 5 kg
Repeatability to ±0.06 µm
Velocity to 10 mm/s
Vacuum compatible to 10-6 hPa

H-824 Compact Hexapod

Low Cost, Low Profile

45x45x25mm XYZ travel
15x15x25° rotary travel
10kg & 5kg load
7nm & 500nm actuator resolution
1mm/sec & 25mm/sec max. velocity
Ø281mm base, 190mm height

H-824.V Vacuum-Compatible 6-Axis Hexapod

Compact and Precise

Load capacity to 5 kg, self-locking version
Travel ranges to 45 mm / 25°
Minimum incremental motion to 0.3 µm
Repeatability to ±0.1 µm / ±2 µrad
Velocity to 12.5 mm/s

H-825 Compact Hexapod

BLDC Motors, Absolute Encoders

55x50x28mm XYZ travel
23x28x38° rotary travel
30kg & 5kg load
8nm & 250nm actuator resolution
2mm/sec & 20mm/sec max. velocity
Ø281mm base, 190mm height

H-840 Hexapod w/Absolute Encoder

High Dynamics, Brushless Motors

100x100x50mm XYZ travel
30x30x60° rotary travel
30kg & 10kg load
8nm & 250nm actuator resolution
2mm/sec & 60mm/sec max. velocity
Ø348mm base, 328mm height

H-820 Low-Cost Hexapod

BLDC Motors

Six degrees of freedom, travel ranges to 100 mm / 60°
Load capacity up to 20 kg
Velocity when fully loaded to 20 mm/s
Repeatability to ±0.5 µm
Works in any orientation
Fast response behavior

H-206 Fiber Alignment Hexapod

Flexure Joints for Zero Backlash

Up to 13mm linear travel
Up to 13° rotary travel
1.5kg load
33nm actuator resolution
8mm/sec max. velocity
220x228mm base, 158mm height

H-850 250kg Hexapod

Gear & Direct Drive, BLDC

100x100x50mm XYZ travel
30x30x60° rotary travel
250kg & 50kg load
2nm & 50nm actuator resolution
.5mm/sec & 8mm/sec max. velocity
Ø348mm base, 328mm height

H-850.V Vacuum-Compatible 6-Axis Hexapod

For loads to 80 kg

Load capacity to 80 kg
Repeatability to ±0.2 µm
Travel ranges to ±50 mm / ±30°
Works in any orientation

H-855 500kg Hexapod Family

Self Locking to 5000N

200x200x100mm linear travel
50x50x80° rotary travel
500kg load
4.5mm & 2deg/sec max. velocity
Ø560mm base, 480mm height

H-860 Fast “Shaker Hexapod”

Voice Coils, Flexures, Carbon Fiber

15mm XYZ travel
8° rotary travel
1kg load
5nm actuator resolution
250mm/sec / 4g acceleration
Frictionless flexure guides

H-900KSCO Dynamics Hexapod

60kg, 80mm/sec BLDC

200x200x170mm XYZ travel
66x66x66° rotary travel
60kg load
580nm actuator resolution
80mm/sec max. velocity
Motion simulation: ISO20672, ISO8728, ISO 16328

H-845 1000kg Hexapod

To 340x340x210mm XYZ travel
To 40x40x60° rotary travel
To 1000kg load
40nm actuator resolution
20 to 50mm/sec max. velocity
Ø750mm base, 663mm height

P-911 6-Axis UHV Hexapod

Piezo Motor, Non Magnetic

3x3x3mm XYZ travel
2x2x2° rotary travel
UHV-compatible to 10-9 hPa
1.5kg load
Ø100mm base, 90mm height

M-850KHTH High Load Hexapod

1000kg, Ø500mm Aperture

400x400x200mm XYZ travel
40x40x10° rotary travel
1000kg load, any orientation
0.8µm / 0.5µrad resolution
1mm/sec max. velocity
Ø900mm base, 714mm height

M-850.K102 High Load Hexapod

Vacuum Compatible, 1000kg

24x24x24mm XYZ travel
6x6x8° rotary travel
1000kg load
2µm repeatability
.5mm/sec max. velocity
Ø1000mm base, 500mm height

H-850KMLx 500kg Hexapod

Self Locking to 4000N

100x10x50mm XYZ travel
30x30x60° rotary travel
500kg load
Absolute encoder option
.5mm/sec max. velocity
Ø410mm base, 362mm height

M-850KLAH Large Aperture Hexapod

640x820mm Aperture

50x50x50mm XYZ travel
10x10x10° rotary travel
200kg load
2mm/sec max. velocity
1000x840x400mm

P-587 Nano-Positioning Stage

6-Axis, Parallel Metrology

For scanning and positioning in X, Y, Z, θ_X, θ_Y, θ_Z
800 µm × 800 µm × 200 µm linear travel range
Up to 1 mrad rotational angle
Parallel kinematics for faster response times and higher multi-axis accuracy
Capacitive sensors for highest linearity
Outstanding lifetime due to PICMA® piezo actuators
Zero-play, high-precision flexure guide system
Active compensation in all 6 degrees of freedom

P-562 Nano-Positioning Stage