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Physik Instrumente Precision Motion Systems

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Linear Actuators

Achieve Greater Accuracy in Complex Motion and Alignment Applications

A precision linear actuator is a positioning device that provides motion in 1 degree of freedom. A variety of Physik Instrument Linear Actuators (pushers) including economical stepper-motor driven actuators, high-speed linear motor types for automation and nanometer precise piezo-motor actuators are designed and manufactured by our experts.

Explore Physik Instrumente Precision Motion and Positioning Systems

M-230 High Precision Electric Actuator

Servo & Stepper Motors

  • 10 & 25 mm Travel Range
  • 0.05 Micron Minimum Incremental Motion
  • Non-Rotating Tip
  • Velocity to 2 mm/sec.
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Front Mount or Clamp Mount
  • >5,000 Hours MTB

M-232 Servo Motor Actuator

Compact Servo & Stepper Motors

  • 17 mm Travel Range
  • 0.1 Micron Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit and Origin Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF

M-227 High Precision Electric Actuator

Servo & Stepper Motors

  • 10, 25 & 50 mm Travel Ranges
  • 0.05 Micron Minimum Incremental Motion
  • Non-Rotating Tip
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Sub-Nanometer Resolution with Optional PZT Drive
  • >5,000 Hours MTBF

M-235 High Precision Electric Actuators

Servo & Stepper Motors

  • 20 mm or 50 mm Travel Range
  • 0.1 Micron Minimum Incremental Motion
  • High-Speed Direct Drive Option
  • 120 N Push/Pull Load
  • 100 N Lateral Load Limit
  • Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit & Origin Switches
  • >20,000 Hours MTBF
  • Vacuum Versions

L-220 High Precision Actuators

Servo & Stepper Motors

  • 13/26/52/77mm travel
  • 0.1µm min. incremental motion
  • 20nm sensor resolution
  • 3.5mm/sec max. velocity
  • 125N push/pull force
  • Nonrotating tip

L-239 High Precision Actuators

Servo & Stepper Motors

  • 52mm travel
  • 0.2 & 0.1µm min. inc. motion
  • 50nm sensor resolution
  • 50 & 25mm/sec max. velocity
  • 300N push/pull force
  • Nonrotating tip

M-238 Heavy Duty High Precision Electric Actuators

Servo Motor / Linear Encoder

  • High Load Capacity to 400 N
  • Optional 0.1 Micron Direct Metrology Linear Encoder for Exceptional Precision
  • Travel Range to 50 mm
  • Minimum Incremental Motion to 0.3 Micron
  • Max. Velocity: 30 mm/s
  • Preloaded Frictionless Ball Screw
  • MTBF > 20.000 h
  • Vacuum-Compatible Versions Available for 10-6 hPa

M-168 High-Resolution Stepper-Mike Actuators

  • 10, 25 & 50 mm Travel Ranges
  • Resolution <0.1 Micron
  • 2- and 5-Phase Stepper Motor
  • Manual Positioning Knob
  • Sub-Nanometer Resolution with Optional PZT Actuator
  • >5,000 Hours MTBF

M-231 High-Resolution Closed-Loop DC-Mike Actuators

Compact, Servo & Stepper

  • 17 mm Travel Range
  • 0.1 Micron Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF

M-228/9 Low Cost Electric Linear Actuators

Gear & Direct Drive, Stepper

  • 10, 25 & 50 mm Travel Ranges
  • 0.05 Micron Minimum Incremental Motion
  • Non-Rotating Tip
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Sub-Nanometer Resolution with Optional PZT Drive
  • >5,000 Hours MTBF

V-900KPIC Mini Vertical Electric Actuator

Zero-Wear Flexures

  • 1.5mm travel
  • 100nm linear encoder resolution
  • Frictionless, zero-wear flexures
  • Very compact: 32x44x14mm

V-273 Voice Coil Actuator

Force Sensor Option

  • 20mm travel
  • 10nm linear encoder resolution
  • 100mm/sec max. velocity
  • 6N push/pull force
  • 1mN force sensor option

V-275 Voice Coil Actuator

High-Speed, Force Sensor Option

  • 10mm travel
  • 10nm linear encoder resolution
  • 600mm/sec max. velocity
  • 15N push/pull force
  • 1mN force sensor option

V-277 Voice Coil Actuator

High-Speed, Force Sensor Option

  • 15mm travel
    10nm linear encoder resolution
    750mm/sec max. velocity
    20N push/pull force
    1mN force sensor option

A-142 Mini Voice Coil Linear Slide

High Performance • Cleanroom-Compatible • Option for Vertical Mounting

  • Velocity to 450 mm/s
  • Acceleration to 20 m/s2
  • Sensor resolution: 5 nm
  • Low profile of 27 mm
  • Very compact motion platform: 75 mm × 80 mm
  • Travel range to 10 mm
  • Load capacity to 3 kg
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