Motorized Stages
PI offers the broadest and deepest range of precision motion technologies for micro and nano precision applications, including Motorized Stages. Our engineers work with our customers to find the best drive and bearing technology for each individual application. Having access to multiple drive and positioning technologies allows an open discussion with a better outcome for the customer.
Product Lineup
M-126 Translation Stages with Crossed Roller Bearings
- To 25 mm Travel Range
- Manual, DC-Servo and Stepper-Motor Drives
- ActiveDrive™ Option
- Compatible with Leading Industrial Motion Controllers
- Crossed Roller Bearings
- <0.1 Micron Resolution
- XY and XYZ Combinations
- Direction-Sensing Origin Switch
- Non-Contact Limit Switches
High Precision Stages
A-10x PIglide RB Linear Air Bearing Module
Friction Free, Ideal for Positioning, Scanning, Metrology
- Ideal for scanning applications or high-resolution positioning
- Cleanroom compatible
- Size of the motion platform to 300 mm × 300 mm
- Travel ranges to 1 m
- Load capacity to 775 kg
- Straightness / flatness to 0.5 μm per 25 mm
- Pitch / roll / yaw to 1.2 µrad per 25 mm
A-110 PIglide LC Linear Stage with Air Bearings
Inexpensive High Performance Nanopositioning Stage
- Ideal for scanning applications or high-precision positioning
- Cleanroom compatible
- Size of the motion platform 160 mm × 200 mm
- Travel ranges to 400 mm
- Load capacity to 100 N
A-121 PIglide AT1 Linear Stage with Air Bearings
High Performance Small Footprint Nanopositioning Stage
- Ideal for scanning applications or high-precision positioning
- Cleanroom compatible
- Size of the motion platform 115 mm × 115 mm
- Travel ranges to 350 mm
- Low profile from 60 mm
- Resolution to 1 nm
A-60x PIglide RT Rotary Air Bearing Module
Frictionless, Nonmotorized
- Motion platform diameter from 50 mm to 300 mm
- Load capacity to 425 kg
- Eccentricity / flatness <200 nm
- Can be mounted vertically or horizontally
L-509 V6 • V7 • V9 Vacuum-Compatible Precision Linear Stage
Compact Design, for Loads to 10 kg
- Vacuum compatible up to 10-9 hPa
- Travel ranges from 26 to 102 mm (1″ to 4″)
- Repeatability to 0.1 µm
- DC gear motor, stepper motor
- Direction-sensing reference switch
- Multi-axis setups possible
N-565 Nanometer-Precision Stage
NEXACT® Piezo Stepping Drive with Subnanometer Encoder Resolution
- Ultraprecision: 3 nm minimum incremental motion and direct-measuring PIOne encoder with 0.5 nm resolution
- Long travel ranges: 13 mm, 26 mm or 52 mm
- Self-locking when switched off: Saves energy and reduces generation of heat
- Long lifetime and high reliability due to PiezoWalk® technology
- Compact design: 65 mm width, 20 mm height
High Load Stages
L-731 Integrated High Load Precision XY Stage, 8″ Travel
High Travel Accuracy and Stability
- Travel range 205 mm × 205 mm (8″)
- Unidirectional repeatability to 0.025 µm
- Velocity to 90 mm/s
- 2-phase stepper motor or DC motors
- Incremental linear encoder with 1 nm resolution
- Rotary encoder with 20000 impulses/revolution
L-738 Precision XY Stage
Clear Aperture, High Travel Accuracy, and Stability
- Travel range 102 mm × 102 mm (4″)
- Large aperture, 150 mm × 150 mm
- Unidirectional repeatability to 0.025 µm
- Velocity to 90 mm/s
- 2-phase stepper motors, DC motors
- Incremental linear encoder with 1 nm resolution
L-741 Precision XY Stage
High Travel Accuracy and Stability, 305 × 305 mm Travel Range
- Travel range 305 mm × 305 mm (12”)
- Unidirectional repeatability to 0.05 µm
- Velocity to 90 mm/s
- 2-phase stepper motor or DC motors
- Incremental linear encoder with 1 nm resolution
- Rotary encoder with 20000 impulses/revolution
L-412 High-Load Linear Stage
High Performance, Drive Screw
- Width 116 mm, travel range to 610 mm
- Precision ball screw
- Incremental and absolute rotary encoders
- Additional linear encoder options
- Precision recirculating ball bearing guides, load capacity to 400 N
- Covering strip on the side for protection against particles
L-417 High-Load Linear
High Performance, Spindle Drive
- Width 166 mm
- Travel range to 813 mm
- Precision ball screw
- Incremental or absolute linear encoder, various resolutions
- Precision recirculating ball bearing guides, load capacity to 450 N
- Covering strip on the side for protection against particles
L-812 High-Load Linear Stage
Stepper or Servo Motor • Spindle Drive • Cost Effective
- Width: 114 mm, travel range up to 610 mm
- Precision ball screw, load capacity up to 50 kg
- Stepper or servo motor
- Compact design thanks to models with folded drivetrain
- Models with holding brake for vertical mounting
V-417 High-Load Linear Stage
High Performance, Linear Motor
- Width 166mm
- Travel range to 813 mm
- Nominal force 87 N
- Incremental or absolute linear encoder
- Precision recirculating ball bearings, load capacity to 450 N
- Covering strip on the side for protection against particles
High Speed Stages
A-123 PIglide AT3 Linear Stage with Air Bearings
High Performance Nanopositioning Stage
- Ideal for scanning applications or high-precision positioning
- Cleanroom compatible
- Size of the motion platform 210 mm × 210 mm
- Travel ranges 50 mm to 750 mm
- Resolution to 1 nm
A-311 PIglide IS Planar Scanner with Air Bearing
High-Performance, Compact XY Nanopositioning System
- Ideal for scanning applications or high-precision positioning
- Cleanroom compatible
- Travel ranges to 300 mm × 400 mm
- Load capacity to 147 N
- Low profile
- Resolution to 1 nm
A-322 PIglide HS Planar Scanner with Air Bearing
XY Positioning System with 1 nm Resolution
- Ideal for scanning applications or high-precision positioning
- Cleanroom compatible
- Travel ranges to 500 mm × 1000 mm
- Load capacity to 245 N
- Resolution to 1 nm, Velocity to 2 m/s
- Three performance classes: Base, Plus, and Ultra
Rotary Stages
L-611 Precision Rotation Stage
High Travel Accuracy
- Unlimited travel range
- Very high resolution
- Maximum velocity 200°/s
- DC, BLDC, and stepper motors
- Direction-sensing reference switch
- Vacuum-compatible variants available
PRS-200 Precision Rotation Stage
Large Aperture, High Travel Accuracy
- Unlimited travel range
- Repeatability to 5 µrad
- Load capacity to 50 kg
- Option: Direct position measurement with angle measuring system
V-610 Compact PIMag® Rotation Stage
Flat Design at High-Torque for Loads up to 2 kg
- Flat and compact design
- Clear aperture for transmitted-light applications
- Optional holding brake
- Ironless PIMag® torque motor developed in-house for high drive torque
V-611 Rotation Stage
High Load Capacity and Long Lifetime for Industrial Applications
- Deep groove ball bearings provide high load capacity and long lifetime
- Clear aperture for transmitted-light applications
- High velocity and acceleration
- Iron core 3-phase torque motor
V-62x High-Precision Rotation Stage with Direct Drive
Ideal for Indexing, Positioning, Scanning, Measuring Technology
- Direct drive for efficient dynamic performance
- Motion platform diameters of 85 mm, 110 mm, and 210 mm
- Eccentricity and flatness < 1 µm
- Can be used in any orientation
- Low profile
A-62x PIglide RM Rotation Stage with Air Bearings
Friction-Free, Ideal for Indexing, Positioning, Scanning, Measuring Technology
- Cleanroom compatible
- Motion platform diameter from 50 mm to 300 mm
- Load capacity to 4170 N
- Eccentricity and flatness < 200 nm
- Can be mounted vertically or horizontally
A-63x PIglide RL Flat Rotation Stage with Air Bearing
Friction-free, Motorized
- 150 mm, 200 mm or 350 mm motion platform diameter
- Low profile
- Eccentricity and flatness < 100 nm
- Option for self-locking at rest by magnetic preload
A-68x PIglide RLA Rotation Stage with Air Bearings, Large Aperture
Friction-free, Motorized
- 365 mm diameter motion platform, 260 mm diameter aperture
- Low profile
- Eccentricity and flatness < 300 nm
Q-632 Q‑Motion® Rotation Stage
Compact Through Piezo Motor: 30 mm Turntable Diameter
- Only 32 mm in width and 8 mm in height
- Direct position measurement with incremental encoder with 0.75 µrad resolution
- Up to 3 µrad minimum incremental motion
- Rotation range >360°
- Velocity 45 °/s
M-060 • M-061 • M-062 Precision Rotation Stage
Unlimited Travel Range
- Unlimited travel range
- High resolution
- Maximum velocity 16°/s
- Backlash-compensated worm drive
- DC gear motor
- Direction-sensing reference switch
RS-40 Compact Rotation Stage
Precision Positioning
- Unlimited travel range
- Repeatability to 87 µrad
- 20 mm Ø aperture
- Reference switch
- Vacuum-compatible variants available
DT-80 Compact Rotation Stage
Large Clear Aperture
- Unlimited travel range
- Repeatability to 175 µrad
- Maximum velocity 40°/s
- Reference switch
U-651 Rotation Stage with Low-Profile Design
Fast PILine® Direct Drive and Central Opening
- Low profile of only 14 mm
- Positions larger loads quickly and with precision
- Unlimited rotation range >360°
- Drive torque to 0.3 Nm in both directions of rotation
- Self-locking when switched off: saves energy and reduces generation of heat
- Central aperture for more fields of application
Z/Tip/Tilt Stages
L-306 Compact Precision Z Stage
Compact Design, Multi-Axis Combinations
- Compact design: Surface 63 × 63 mm
- Stepper motors and closed-loop DC motors
- Optional: Linear encoder for direct position measuring
- Crossed roller guides
- Noncontact reference and limit switches
L-310 Precision Z Stage
Compact Multi-Axis Combinations with Linear and Rotation Stages
- Travel range 26 mm (1″)
- High-resolution encoder
- DC, BLDC, and stepper motors
- Zero-play ball screw
- Load capacity to 10 kg
L-310 V6 Precision Z Stage Suitable for Vacuum
Can be Compactly Combined with Linear and Rotation Stages
- Suitable for vacuum up to 10-6 hPa
- Travel range 26 mm (1″)
- High-resolution encoder
- Stepper motor
- Zero-play ball screw
- Load capacity to 5.5 kg
A-523 PIglide High-Precision Z Tip/Tilt Stage with Air Bearings
High Performance • Cleanroom-Compatible • Low Profile
- Travel range in Z to ±2.5 mm
- Rotation range in θX, θY to ±1°
- Load capacity to 8 kg
- Platform diameter 250 mm
- Overall height 60 mm
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