Piezo Flexure Nanopositioning Stages
Piezo Flexure Nanopositioning Stages are used in applications where nanometer precision, high scanning speeds or fast step and settle are crucial for success. Piezo stages are still the highest performing mechanisms when it comes to nanopositioning applications.
Product Lineup
Linear Stages
P-561 • P-562 • P-563 PIMars Nanopositioning Stage
High-Precision Nanopositioner for up to 3 Axes
- Parallel kinematics in the X and Y axes for faster response times and greater multi-axis accuracy
- Travel ranges to 300 × 300 × 300 µm
- Highest linearity due to capacitive sensors
- Zero-play and highly accurate flexure guides
- Excellent scanning flatness
- High dynamics XYZ version
- Clear aperture 66 mm × 66 mm
- Outstanding lifetime thanks to PICMA® piezo actuators
- UHV versions to 10-9 hPa
P-621.1U • P-625.1U PIHera Linear Precision Positioner
Vacuum Compatible and with Variable Travel Ranges and Axis Configuration
- Travel ranges 100 to 500 µm (600 µm open loop)
- Resolution to 0.2 nm
- Linearity error ≤0.03 %
- XY combination possible
- UHV versions to 10-9 hPa
P-750 Piezo Nanopositioner
High-Load Piezo-Driven Nanopositioner with Direct Position Measuring
- Backlash-free, high-precision flexure guides
- Load capacity 5 to 10 kg (depending on mounting orientation)
- Resolution <1 nm
- Direct metrology with capacitive sensors for highest precision
- Direct drive for fast response
- Travel range 75 µm
- Outstanding lifetime due to PICMA® piezo actuators
P-752 High-Precision Nanopositioning Stage
Highly Dynamic and Stable Piezo Scanner with Extremely Accurate Guiding
- Resolution 0.1 nm
- Fast response behavior
- Travel range up to 35 µm
- Highest linearity due to capacitive sensors
- Friction-free flexure guides for very high travel accuracy
- Outstanding lifetime thanks to PICMA® piezo actuators
P-753 LISA Linear Actuator and Positioning Stage
Dynamic and Stable in Position
- Guided stage and actuator at the same time
- Travel range up to 38 µm
- Resolution 0.1 nm
- Particularly fast response behavior due to direct drive
- Highest linearity due to capacitive sensors
Compact/Miniature Stages
P-620.1 – P-629.1 PIHera® Miniature Long-Range Piezo-Stage Nanopositioning System with Direct Metrology
- XY-Travel to 1800 µm
- Compact Design
- Resolution <1 Nanometer
- Frictionless Precision Flexure Guiding System
- PICMA® High-Performance Piezo Drives
- Direct Metrology with Capacitive Sensors for Highest Precision
- Up to 0.02% Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions
P-611.ZS · P-611.XZS Compact Z and XZ Piezoelectric Nanopositioning Systems
- Small Footprint: 44 x 44 mm
- 100 Micron Travel
- Range Resolution to 0.2 Nanometer
- For Cost-Sensitive Applications
- PICMA® High-Performance Multilayer Piezo Actuators
- Open- and Closed-Loop Models
Q-521 Q‑Motion® Miniature Linear Stage
Smallest Linear Stage with Position Control, High Resolution and Affordable Price
- Only 21 mm in width and 10 mm in height
- Direct position measurement with integrated incremental encoder
- Encoder resolution up to 1 nm
- Minimum incremental motion down to 30 nm
- Multi-axis system setups with adapter plate or bracket (available as an option)
Q-545 Q‑Motion® Precision Linear Stage
High Forces and Small Design Due to Piezo Motors
- Only 45 mm in width
- Drive force 7 N
- Incremental sensors with nanometer position resolution
- XY combinations without adapter plate possible
Q-632 Q‑Motion® Rotation Stage
Compact Through Piezo Motor: 30 mm Turntable Diameter
- Only 32 mm in width and 8 mm in height
- Direct position measurement with incremental encoder with 0.75 µrad resolution
- Up to 3 µrad minimum incremental motion
- Rotation range >360°
- Velocity 45°/s
XY Stages
P-517 • P-527 Multi-Axis Piezo Scanner
High Dynamics Nanopositioner / Scanner with Direct Position Measuring
- 2- and 3-axis versions (XY and XYθZ)
- Travel ranges to 200 µm
- Subnanometer resolution
P-611.1 · P-611.2 Compact X and XY Piezoelectric Nanopositioning Systems
- Small Footprint: 44 x 44 mm
- 100 Micron Travel
- Range Resolution to 0.2 Nanometer
- For Cost-Sensitive Applications
- PICMA® High-Performance Multilayer Piezo Actuators
- Z-Stage also Available
P-612.2 XY Piezo Nanopositioner
Compact, with Aperture
- Compact: Surface 60 mm × 60 mm
- 100 µm × 100 µm closed-loop travel range (130 µm × 130 µm, open loop)
- For cost-critical applications
- Clear aperture 20 mm × 20 mm
- Parallel kinematics for faster response times and higher multi-axis accuracy
- Outstanding lifetime thanks to PICMA® piezo actuators
- Also available as compact version
P-733.2 XY Piezo Nanopositioner
High-Precision XY Scanner with Aperture
- Travel ranges to 100 µm × 100 µm in X and Y
- Resolution to 0.1 nm due to capacitive sensors
- High velocity versions with direct drive
- Vacuum-compatible and nonmagnetic versions on request
- Parallel kinematics for higher accuracy and dynamics
- Parallel metrology for active compensation of guiding errors
- Zero-play, high-precision flexure guide system
- Clear aperture 50 mm × 50 mm for transmitted-light applications
P-734 XY Piezo Scanner
Highly Dynamic, Highest Travel Accuracy, with Aperture
- Flatness 5 nm, ideal for surface analysis and scanning microscopy
- Parallel kinematics for faster response times and higher multi-axis accuracy
- Travel range 100 µm × 100 µm
- Clear aperture 56 mm × 56 mm
- Resolution of 0.3 nm due to capacitive position sensors
U-751 Integrated XY Linear Stage
Low-Profile and Fast, Direct Position Measurement
- Compact design: Only 32 mm in height, no lead screw ducts or flanged motors
- Direct-measuring linear encoder with 100 nm resolution
- Self-locking, no heat generation at rest, no servo jitter
- Clear aperture 78 mm × 78 mm (at maximum displacement 65 mm × 65 mm)
- Noncontact limit and reference switches
XYZ Stages
P-561 • P-562 • P-563 PIMars Nanopositioning Stage
High-Precision Nanopositioner for up to 3 Axes
- Parallel kinematics in the X and Y axes for faster response times and greater multi-axis accuracy
- Travel ranges to 300 × 300 × 300 µm
- Highest linearity due to capacitive sensors
- Zero-play and highly accurate flexure guides
- Excellent scanning flatness
- High dynamics XYZ version
- Clear aperture 66 mm × 66 mm
- Outstanding lifetime thanks to PICMA® piezo actuators
- UHV versions to 10-9 hPa
P-611.3S · P-611.3O NanoCube® XYZ Nanopositioning Piezo System
- 100 x 100 x 100 Micron Travel Range
- Very Compact: 44 x 44 x 44 mm
- 1 Nanometer Resolution
- Ideal for Fiber-Alignment and Photonics Packaging Applications
- Optional E-760 Controller Card Features Built-In Optical Metrology
- Closed- and Open-Loop Versions
- Flexure-Guided Precision Trajectory Control
- Fast Scanning and Settling
- Large Variety of Controllers
P-733.3 XYZ Piezo Nanopositioner
High-Precision XYZ Scanner with Aperture
- Travel ranges to 100 µm × 100 µm in X, Y and to 10 µm in Z
- Resolution to 0.1 nm due to capacitive sensors
- High velocity versions with direct drive
- Ultrahigh vacuum-compatible and nonmagnetic versions on request
- Parallel kinematics for higher accuracy and dynamics
- Parallel metrology for active compensation of guiding errors
- Zero-play, high-precision flexure guide system
- Clear aperture 50 mm × 50 mm for transmitted-light applications
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