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Piezo Flexure Nanopositioning Stages

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Piezo flexure stages are used in applications where nanometer precision, high scanning speeds or fast step and settle are crucial for success. Piezo stages are still the highest performing mechanisms when it comes to nanopositioning applications.

Product Lineup

P-620.1 – P-629.1 PIHera® Miniature Long-Range Piezo-Stage Nanopositioning System with Direct Metrology

Physik Instrument P-620.1 - P-629.1 PIHera® Miniature Long-Range Piezo-Stage Nanopositioning System with Direct Metrology

  • XY-Travel to 1800 µm
  • Compact Design
  • Resolution <1 Nanometer
  • Frictionless Precision Flexure Guiding System
  • PICMA® High-Performance Piezo Drives
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Up to 0.02% Position Accuracy
  • X, XY, Z, XYZ Versions
  • Vacuum-Compatible Versions

P-611.ZS · P-611.XZS Compact Z and XZ Piezoelectric Nanopositioning Systems

Physik Instrument P-611.ZS · P-611.XZS Compact Z and XZ Piezoelectric Nanopositioning Systems

  • Small Footprint: 44 x 44 mm
  • 100 Micron Travel
  • Range Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Open- and Closed-Loop Models

P-611.1 · P-611.2 Compact X and XY Piezoelectric Nanopositioning Systems

Physik Instrument P-611.1 · P-611.2 Compact X and XY Piezoelectric Nanopositioning Systems

  • Small Footprint: 44 x 44 mm
  • 100 Micron Travel
  • Range Resolution to 0.2 Nanometer
  • For Cost-Sensitive Applications
  • PICMA® High-Performance Multilayer Piezo Actuators
  • Z-Stage also Available

P-611.3S · P-611.3O NanoCube® XYZ Nanopositioning Piezo System

Physik Instrument P-611.3S · P-611.3O NanoCube® XYZ Nanopositioning Piezo System

  • 100 x 100 x 100 Micron Travel Range
  • Very Compact: 44 x 44 x 44 mm
  • 1 Nanometer Resolution
  • Ideal for Fiber-Alignment and Photonics Packaging Applications
  • Optional E-760 Controller Card Features Built-In Optical Metrology
  • Closed- and Open-Loop Versions
  • Flexure-Guided Precision Trajectory Control
  • Fast Scanning and Settling
  • Large Variety of Controllers

For more information about these products…
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